Mmepụta nke 6N (≥99.9999% ịdị ọcha) sọlfọ dị ọcha na-achọ ọtụtụ distillation, mgbasa ozi miri emi, na nzacha ultra-dị ọcha iji kpochapụ ọla ndị dị n'ahụ, adịghị ọcha na ihe ndị dị na ya. N'okpuru ebe a bụ usoro ụlọ ọrụ mmepụta ihe na-ejikọta agụụ distillation, nchacha ngwa ngwa na-enyere aka dị ọcha, na teknụzụ ziri ezi mgbe ọgwụgwọ gasịrị.
M. Ngwọta ihe eji eme ihe na mwepu adịghị ọcha
1. Nhọrọ na nhazi ihe eji eme ihe
- ;Ihe achọrọ: Ịdị ọcha sọlfọ mbụ ≥99.9% (ọkwa 3N), adịghị ọcha ígwè ≤500 ppm, ọdịnaya carbon carbon ≤0.1%.
- ;Na-agbaze Microwave-enyere aka:
A na-edozi sọlfọ crude n'ime igwe ọkụ ọkụ (2.45 GHz ugboro, ike 10–15 kW) na 140-150°C. Ntugharị dipole na-ebute Microwave na-eme ka agbaze ngwa ngwa ka ọ na-emebi adịghị ọcha (dịka ọmụmaatụ, ogige tar). Oge ịgbaze: 30-45 nkeji; omimi ntinye ngwa ndakwa nri: 10-15 cm - ;Ịsacha mmiri deionized:
A na-agwakọta sọlfọ a wụrụ awụ na mmiri deionized (resistivity ≥18 MΩ · cm) na 1: 0.3 mass ratio na a kpaliri reactor (120 Celsius C, 2 mmanya mgbali) maka 1 hour iji wepụ mmiri-soluble salts (dịka, ammonium sulfate, sodium chloride). A na-ewepụ usoro mmiri mmiri ma jiri ya mee ihe maka usoro 2-3 ruo mgbe conductivity ≤5 μS/cm.
2. Multi-Stage Adsorption na Filtration
- ;Ụwa Diatomaceous/ Mgbasa Ozi Carbon Na-arụ Ọrụ:
A na-agbakwunye ụwa Diatomaceous (0.5-1%) na carbon na-arụ ọrụ (0.2-0.5%) na sọlfọ a wụrụ awụ n'okpuru nchebe nitrogen (130 Celsius C, ihe na-akpali awa 2) iji mee ka ogige ígwè na ihe ndị fọdụrụnụ. - ;Ultra-nkenke nzacha:
Nzacha nke ọkwa abụọ site na iji titanium sintered filter (0.1 μm pore size) na ≤0.5 MPa usoro nrụgide. Ọnụọgụ ụmụ irighiri ihe nzacha gachara: ≤10 irighiri ihe / L (nha> 0.5 μm).
II. Usoro mkpochapụ oghere ọtụtụ ogbo
1. Distillation nke mbụ (Mwepụ adịghị ọcha nke igwe)
- ;Akụrụngwa: kọlụm distillation quartz dị elu dị ọcha na ngwugwu 316L igwe anaghị agba nchara (≥15 theoretical plates), agụụ ≤1 kPa.
- ;Parameter arụ ọrụ:
- ;Nri okpomọkụ: 250-280°C (sulfur esi na 444.6°C n'okpuru ambient mgbali; agụụ na-ebelata esi esi ruo 260-300°C).
- ;Oke reflux: 5:1–8:1; kọlụm n'elu okpomọkụ mgbanwe ≤±0.5°C.
- ;Ngwaahịa: sọlfọ dị ọcha condensed ≥99.99% (4N ọkwa), ngụkọta metal adịghị ọcha (Fe, Cu, Ni) ≤1 ppm.
2. Ọkpụkpụ Molecular nke abụọ (Mwepụ adịghị ọcha Organic)
- ;Akụrụngwa: Ihe distiller molecular nke dị mkpụmkpụ na 10-20 mm evaporation-condensation gap, evaporation okpomọkụ 300-320 ° C, agụụ ≤0.1 Pa.
- ;Nkewa adịghị ọcha:
A na-ekpochapụ ihe ndị na-esi ísì ụtọ (dịka ọmụmaatụ, thioethers, thiophene) ma wepụ ya, ebe adịghị ọcha na-esi ísì (dịka ọmụmaatụ, polyaromatics) na-anọgide na-adị na nsị n'ihi ọdịiche dị na ụzọ efu molecular. - ;Ngwaahịa: sọlfọ dị ọcha ≥99.999% (5N ọkwa), organic carbon ≤0.001%, ihe fọdụrụ <0.3%.
3. Nnụcha mpaghara atọ (Inweta ịdị ọcha 6N)
- ;Akụrụngwa: Nnụcha mpaghara kwụ ọtọ na njikwa okpomọkụ nke ọtụtụ mpaghara (± 0.1 Celsius C), ọsọ njem mpaghara 1-3 mm / h.
- ;Nkewa:
Iji ọnụọgụ nkewa (K=Csolid/CliquidK=Csiri ike /Cmmiri mmiri), mpaghara 20-30 na-agafe ọla kọpa (As, Sb) na njedebe ingot. A na-atụfu 10-15% ikpeazụ nke sọlfọ ingot.
III. Ọgwụgwọ-ọgwụgwọ na Ultra-Clean Forming
1. Ultra-dị ọcha mgbaze mmịpụta
- ;Mwepụta Ether/Carbon Tetrachloride:
A na-ejikọta sọlfọ na chromatographic-grade ether (1: 0.5 volume ratio) n'okpuru enyemaka ultrasonic (40 kHz, 40 ° C) maka nkeji 30 iji wepụ trace polar organics . - ;mgbake mgbake:
Mgbakwunye sieve molecular na mkpochapụ agụụ na-ebelata ihe mgbaze ruo ≤0.1 ppm.
2. Ultrafiltration na ion Exchange
- ;PTFE membrane Ultrafiltration:
A na-enyocha sọlfọ a wụrụ awụ site na 0.02 μm PTFE membranes na 160-180 ° C na nrụgide ≤0.2 MPa. - ;Mgbanwe nke ion mgbanwe resins:
Resins chelating (dịka ọmụmaatụ, Amberlite IRC-748) na-ewepu ion metal ppb (Cu²⁺, Fe³⁺) na 1–2 BV/h ọnụego erute.
3. Ịmepụta gburugburu dị ọcha dị ọcha
- ;Inert gas atomization:
N'ime ụlọ dị ọcha nke klaasị 10, sọlfọ a wụrụ awụ na-eji nitrogen (nrụgide 0.8-1.2 MPa) banye n'ime granules okirikiri 0.5-1 mm (mmiri <0.001%). - ;Nkwakọ ngwaahịa Vacuum:
A na-ekpuchi ngwaahịa ikpeazụ na agụụ na-ekpuchi ihe nkiri aluminom mejupụtara n'okpuru argon dị ọcha (≥99.9999% ịdị ọcha) iji gbochie oxidation.
IV. Usoro usoro igodo
Usoro usoro | Okpomọkụ (°C) | Nrụgide | Oge / Ọsọ | Akụrụngwa isi |
Na-agbaze Microwave | 140–150 | Ambient | 30–45 min | Igwe ọkụ ọkụ reactor |
Ịsacha mmiri deionized | 120 | 2 mmanya | 1 elekere / okirikiri | Reactor kpalitere |
Ọkpụkpụ Molecular | 300–320 | ≤0.1 Pa | Na-aga n'ihu | Ụzọ Mkpirisi Ọkpụkpụ Molecular Distiller |
Nnụcha mpaghara | 115–120 | Ambient | 1-3 mm / h | Ihe nnụcha mpaghara kwụ ọtọ |
PTFE Ultrafiltration | 160–180 | ≤0.2 MPa | 1-2 m³/h eruba | Ihe nzacha dị elu |
Nitrogen atomization | 160–180 | 0.8–1.2 MPa | 0.5-1 mm granules | Ụlọ elu Atomization |
V. Njikwa Ogo na Nnwale
- ;Chọpụta ihe nyocha adịghị ọcha:
- ;GD-MS (Glow Discharge Mass Spectrometry): Na-achọpụta ọla na ≤0.01 ppb.
- ;TOC Analyzer: Na-atụ carbon organic ≤0.001 ppm.
- ;Njikwa nha urughuru:
Mgbasa laser (Mastersizer 3000) na-eme ka mgbawa D50 ≤± 0.05 mm. - ;Ịdị ọcha nke elu:
XPS (X-ray Photoelectron Spectroscopy) na-akwado ọkpụrụkpụ oxide elu ≤1 nm.
VI. Nchekwa na gburugburu ebe obibi
- ;Mgbochi mgbawa:
Ndị na-achọpụta ire ọkụ infrared na sistemụ idei mmiri nitrogen na-edobe ọkwa oxygen <3% - ;Njikwa ikuku:
- ;Acid Gases: Nhịahụ NaOH nke agba abụọ (20% + 10%) na-ewepụ ≥99.9% H₂S/SO₂.
- ;VOCs: Zeolite rotor + RTO (850°C) na-ebelata hydrocarbons na-abụghị methane ka ≤10 mg/m³.
- ;Imegharị ihe mkpofu:
Mbelata okpomọkụ dị elu (1200 Celsius) na-eweghachi ọla; Ọdịnaya sọlfọ fọdụrụ <0.1%.
VII. Teknụzụ-Economic Metrics
- ;Oriri ike: 800-1200 kWh ọkụ eletrik na 2-3 tọn uzuoku kwa ton nke 6N sọlfọ.
- ;Mmụba: Sulfur mgbake ≥85%, ihe fọdụrụ <1.5%.
- ;Ọnụ: Ọnụ ahịa mmepụta ~ 120,000-180,000 CNY / ton; Ọnụ ahịa ahịa 250,000–350,000 CNY/ton (ọkwa semiconductor) .
Usoro a na-emepụta 6N sọlfọ maka semiconductor photoresists, III-V compound substrates, na ngwa ndị ọzọ dị elu. Nleba anya oge (dịka ọmụmaatụ, nyocha elemental LIBS) na nhazi ụlọ dị ọcha nke ISO Class 1 na-eme ka ịdị mma na-agbanwe agbanwe.
Ihe odide ala ala peeji
- Ntụaka 2: Ụkpụrụ Nchacha Sulfur ụlọ ọrụ
- Ntụaka 3: Usoro nzacha dị elu na injinịa kemịkalụ
- Ntụaka 6: Akwụkwọ ntuziaka na-ahazi ihe dị ọcha
- Ntuziaka 8: Semiconductor-Grade Chemical Production Protocols
- Ntụaka 5: Nrụpụta ihe na-ekpochapụ oghere
Oge nzipu: Eprel-02-2025