Mmepụta nke sọlfọ dị ọcha nke 6N (≥99.9999% ịdị ọcha) chọrọ nrụpụ dị iche iche, njupụta miri emi, na nzacha dị ọcha iji kpochapụ ọla ndị na-adịghị ọcha, ihe ndị na-adịghị ọcha na ihe ndị na-adịghị ọcha. N'okpuru ebe a bụ usoro ụlọ ọrụ mmepụta ihe nke na-ejikọta nrụpụ vacuum, nrụpụ enyere aka na microwave, na teknụzụ nhazi mgbe emechara ọgwụgwọ.
I. Ọgwụgwọ Tupu na Mwepụ Ihe Ndị A Na-anaghị Ewu Ewu
1. Nhọrọ na Ọgwụgwọ Tupu Ihe Ndị A Na-anaghị Arụ Ọrụ
- ;Ihe achọrọ: Mmalite ịdị ọcha sọlfọ ≥99.9% (ọkwa 3N), mkpokọta ihe adịghị ọcha ígwè ≤500 ppm, ọdịnaya carbon organic ≤0.1%.
- ;Ịgbaze nke enyere aka na ngwa ndakwa nri:
A na-ahazi sọlfọ dị nro n'ime ihe na-eme ka oji microwave rụọ ọrụ (ugboro 2.45 GHz, ike 10–15 kW) na 140–150°C. Mgbanwe dipole nke oji microwave na-eme ka ọ gbazee ngwa ngwa ebe ọ na-emebi ihe ndị na-adịghị ọcha (dịka ọmụmaatụ, ihe ndị na-eme ka oji microwave rụọ ọrụ). Oge ịgbaze: nkeji 30–45; omimi ịbanye na oji microwave: 10–15 cm - ;Ịsa Mmiri E Deionized:
A na-agwakọta sọlfọ a kpụrụ akpụ na mmiri e tinyere ion (resistive ≥18 MΩ·cm) na oke oke 1:0.3 na ihe na-eme ka ihe na-eme ka ihe na-esi ísì ụtọ (120°C, nrụgide mmanya 2) ruo otu awa iji wepụ nnu mmiri na-agbaze (dịka ọmụmaatụ, ammonium sulfate, sodium chloride). A na-ewepụ usoro mmiri ahụ ma jiri ya mee ihe ọzọ maka usoro 2-3 ruo mgbe ọ ga-eme ka ihe na-esi ísì ụtọ ≤5 μS/cm.
2. Mkpọsa na nzacha nke ọtụtụ usoro
- ;Ụwa Diatomaceous/Mgbasasị Carbon Emere Ka Ọ Dị:
A na-etinye ala diatomaceous (0.5–1%) na carbon arụ ọrụ (0.2–0.5%) na sọlfọ agbazere n'okpuru nchekwa nitrogen (130°C, na-akpali awa 2) iji dọba ihe ndị mejupụtara ígwè na ihe ndị fọdụrụ na organic. - ;Nzacha nke Ultra-Precision:
Nzacha nke usoro abụọ site na iji ihe nzacha titanium sintered (nha oghere 0.1 μm) na nrụgide sistemụ ≤0.5 MPa. Ọnụọgụ ihe ndị dị na ya mgbe a sachara ya: ≤10 ihe ndị dị na ya/L (nha karịrị 0.5 μm).
II. Usoro Mwepụ Vacuum nke Ọtụtụ Ogbo
1. Mwepụ nke Isi (Mwepụ nke Njịcha Ígwè)
- ;Ngwa: kọlụm nke quartz dị ọcha nke nwere ngwugwu ígwè anaghị agba nchara 316L (≥15 efere echiche), ikuku ≤1 kPa.
- ;Usoro Ọrụ:
- ;Okpomọkụ nri: 250–280°C (sọlfọ na-agba na 444.6°C n'okpuru nrụgide gburugburu; ihe na-eme ka mmiri ghara ịgba ọkụ na-ebelata ebe mmiri na-agba ọkụ ruo 260–300°C).
- ;Oke Reflux: 5:1–8:1; mgbanwe okpomọkụ elu kọlụm ≤±0.5°C.
- ;Ngwaahịa: ịdị ọcha sọlfọ ≥99.99% (ọkwa 4N), ihe ruru unyi ígwè niile (Fe, Cu, Ni) ≤1 ppm.
2. Mwepụ nke molekụla nke abụọ (Mwepụ nke adịghị ọcha organic)
- ;Ngwa: ihe na-eme ka ihe na-eme ka ihe na-eme ka ihe dị n'ime molekul dị mkpụmkpụ nke nwere oghere evaporation-condensation nke 10–20 mm, okpomọkụ evaporation nke 300–320°C, vacuum nke ≤0.1 Pa.
- ;Nkewa nke adịghị ọcha:
A na-ekupụ ma wepụ ihe ndị dị ndụ na-esi obere mmiri (dịka ọmụmaatụ, thioethers, thiophene) n'ime uzuoku, ebe ihe ndị na-esi nnukwu mmiri (dịka ọmụmaatụ, polyaromatics) ka dị n'ime ihe fọdụrụ n'ihi ọdịiche dị n'ụzọ enweghị molekul. - ;Ngwaahịa: Ịdị ọcha sọlfọ ≥99.999% (ọkwa 5N), carbon organic ≤0.001%, ọnụego ihe fọdụrụ <0.3%.
3. Ịrụcha Mpaghara Atọ (Imezu Ọcha 6N)
- ;Ngwa: ihe na-eme ka ihe na-eme ka ihe na-arụ ọrụ nke ọma nwere njikwa okpomọkụ mpaghara dị iche iche (±0.1°C), ọsọ njem mpaghara 1–3 mm/h.
- ;Nkewa:
Iji ihe ndị na-ekewapụ ihe (K=Csolid/Cliquid) mee iheK=Csiri ikeCmmiri mmiri), mpaghara 20–30 na-agafe ọla ndị a na-atụkọta ọnụ (As, Sb) na njedebe ingot. A na-atụfu 10–15% ikpeazụ nke ingot sọlfọ ahụ.
III. Mmepụta mgbe ọgwụgwọ gasịrị na nhazi dị ọcha nke ukwuu
1. Mwepụta ihe mgbaze dị ọcha nke ukwuu
- ;Mwepụta Ether/Kabọn Tetrachloride:
A na-agwakọta sọlfọ na ether chromatographic-grade (oke olu 1:0.5) n'okpuru enyemaka ultrasonic (40 kHz, 40°C) ruo nkeji iri atọ iji wepụ ihe ndị na-emepụta polar. - ;Mgbake ihe mgbaze:
Ntinye ihe na-eme ka ihe ndị na-agbaze mmiri na ihe ndị na-eme ka ihe ghara ịgbaze mmiri belata ruo ≤0.1 ppm.
2. Ultrafiltration na mgbanwe Ion
- ;Ultrafiltration nke PTFE Membrane:
A na-enyocha sọlfọ a kpụchara akpụ site na akpụkpọ ahụ PTFE nke 0.02 μm na okpomọkụ 160–180°C na nrụgide ≤0.2 MPa. - ;Resin Mgbanwe Ion:
Resin Chelating (dịka ọmụmaatụ, Amberlite IRC-748) na-ewepụ ion metal dị larịị ppb (Cu²⁺, Fe³⁺) na ọnụego mmiri 1–2 BV/h.
3. Ịmepụta Gburugburu Ebe Obibi Dị Ọcha nke Ukwuu
- ;Mwepụ Gas Na-adịghị Agbanwe:
N'ime ụlọ nhicha nke Klas 10, a na-eji nitrogen (nrụgide 0.8–1.2 MPa) mee ka sọlfọ gbazere agbaze ghọọ ihe dị ka 0.5–1 mm (mmiri <0.001%). - ;Nkwakọ ngwaahịa uzuzu:
A na-emechi ngwaahịa ikpeazụ na ihe nkiri mejupụtara aluminom n'okpuru argon dị ọcha nke ukwuu (≥99.9999% ịdị ọcha) iji gbochie oxidation.
IV. Isi Usoro Paramita
| Ọkwa Usoro | Okpomọkụ (°C) | Nrụgide | Oge/Ọsọ | Ngwaọrụ Isi |
| Ngwa ndakwa nri | 140–150 | Gburugburu | Nkeji 30–45 | Ngwa ndakwa nri microwave |
| Ịsa Mmiri E Deionized | 120 | Ogwe abụọ | 1 awa/ogbako | Ngwakọta Reactor |
| Mgbasa nke molekụla | 300–320 | ≤0.1 Pa | Na-aga n'ihu | Ihe na-eme ka Molekụla dị mkpụmkpụ |
| Ịrụcha Mpaghara | 115–120 | Gburugburu | 1–3 mm/h | Ihe Nrụpụta Mpaghara Kwụ ọtọ |
| Ntinye Ultrafilter PTFE | 160–180 | ≤0.2 MPa | Mmiri 1–2 m³/h | Nyo Okpomọkụ Dị Elu |
| Ntinye Nitrogen | 160–180 | 0.8–1.2 MPa | Mkpụrụ ntụ 0.5–1 mm | Ụlọ Elu Atomization |
V. Njikwa na Nnwale Ogo
- ;Nnyocha adịghị ọcha nke Chọpụta:
- ;GD-MS (Ọkpụkpụ Oke Mbelata Ọbara): Na-achọpụta ọla na ≤0.01 ppb.
- ;Onye Nyocha TOC: Na-atụ carbon organic ≤0.001 ppm.
- ;Njikwa Nha Ngwugwu:
Mgbasa laser (Mastersizer 3000) na-eme ka ọdịiche D50 dị ≤±0.05 mm. - ;Ịdị ọcha nke Elu:
XPS (X-ray Photoelectron Spectroscopy) na-egosi na ọkpụrụkpụ oxide dị n'elu ≤1 nm.
VI. Nchekwa na Nhazi Gburugburu Ebe Obibi
- ;Mgbochi Mgbawa:
Ihe nchọpụta ọkụ infrared na sistemụ idei mmiri nitrogen na-eme ka ọkwa oxygen dị ala karịa 3% - ;Njikwa Mwepụ:
- ;Asịd Gasị: Nchacha NaOH nke nwere ogbo abụọ (20% + 10%) na-ewepụ ≥99.9% H₂S/SO₂.
- ;VOCs: rotor zeolite + RTO (850°C) na-ebelata hydrocarbons na-abụghị methane ka ọ bụrụ ≤10 mg/m³.
- ;Imegharị Ihe Mkpofu:
Mbelata okpomọkụ dị elu (1200°C) na-eweghachi ọla; ọdịnaya sọlfọ fọdụrụ <0.1%.
VII. Usoro Teknụzụ na Akụnụba
- ;Oriri Ikeọkụ eletrik 800–1200 kWh na uzuoku 2–3 tọn kwa tọn nke sọlfọ 6N.
- ;Mmụba: mgbake sọlfọ ≥85%, ọnụego ihe fọdụrụ <1.5%.
- ;Ọnụ egoỌnụ ego mmepụta ~120,000–180,000 CNY/ton; ọnụahịa ahịa 250,000–350,000 CNY/ton (ọkwa semiconductor).
Usoro a na-emepụta sọlfọ 6N maka ndị na-eguzogide ọkụ semiconductor, ihe ndị mejupụtara III-V, na ngwa ndị ọzọ dị elu. Nlekota oge (dịka ọmụmaatụ, nyocha elemental LIBS) na nhazi ụlọ nhicha ISO Class 1 na-eme ka mma na-aga n'ihu.
Ihe ndị e dere n'ala ala
- Ntụaka nke 2: Ụkpụrụ Nhicha Sọlfọ nke Ụlọ Ọrụ
- Ntụaka nke 3: Usoro Nzacha Dị Elu na Injinịa Kemịkalụ
- Ntuziaka nke 6: Akwụkwọ ntuziaka nhazi ihe dị elu
- Ntuziaka nke 8: Usoro Mmepụta Kemịkalụ nke Ọkwa Semiconductor
- Ntuziaka nke 5: Nhazi Mgbasa Vakum
Oge ozi: Eprel-02-2025